Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814813 | Chemical vapor deposition apparatus | Ross S. Dando, Craig M. Carpenter, Allen Mardian | 2004-11-09 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Craig M. Carpenter, Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin +2 more | 2004-10-05 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Ross S. Dando, Craig M. Carpenter, Allen Mardian, Gurtej S. Sandhu | 2004-09-07 |
| 6767823 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2004-07-27 |
| 6758911 | Apparatus and process of improving atomic layer deposition chamber performance | David J. Kubista | 2004-07-06 |
| 6734051 | Plasma enhanced chemical vapor deposition methods of forming titanium silicide comprising layers over a plurality of semiconductor substrates | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Gurtej S. Sandhu | 2004-05-11 |
| 6730355 | Chemical vapor deposition method of forming a material over at least two substrates | Ammar Derraa, Cem Basceri, Irina Vasilyeva, Gurtej S. Sandhu | 2004-05-04 |
| 6716284 | Apparatus and process of improving atomic layer deposition chamber performance | David J. Kubista | 2004-04-06 |
| 6677250 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Craig M. Carpenter, Ross S. Dando, Kevin Hamer | 2004-01-13 |