Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6758911 | Apparatus and process of improving atomic layer deposition chamber performance | Philip Campbell | 2004-07-06 |
| 6716284 | Apparatus and process of improving atomic layer deposition chamber performance | Philip Campbell | 2004-04-06 |