Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Craig M. Carpenter, Ross S. Dando, Allen Mardian, Raynald Cantin, Philip Campbell +2 more | 2004-10-05 |
| 6677250 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Philip Campbell, Craig M. Carpenter, Ross S. Dando | 2004-01-13 |