Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821347 | Apparatus and method for depositing materials onto microelectronic workpieces | Craig M. Carpenter, Allen Mardian, Kimberly Tschepen, Garo Derderian | 2004-11-23 |
| 6814813 | Chemical vapor deposition apparatus | Craig M. Carpenter, Philip Campbell, Allen Mardian | 2004-11-09 |
| 6800134 | Chemical vapor deposition methods and atomic layer deposition methods | Gurtej S. Sandhu, Allen Mardian | 2004-10-05 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Craig M. Carpenter, Allen Mardian, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2004-10-05 |
| 6797337 | Method for delivering precursors | Craig M. Carpenter, Allen Mardian, Garo Derderian, Dan Gealy | 2004-09-28 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Craig M. Carpenter, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2004-09-07 |
| 6687969 | Methods of fixturing flexible substrates and methods of processing flexible substrates | — | 2004-02-10 |
| 6677250 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Philip Campbell, Craig M. Carpenter, Kevin Hamer | 2004-01-13 |