Issued Patents 2004
Showing 26–50 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777330 | Chemistry for chemical vapor deposition of titanium containing films | Sujit Sharan, Howard E. Rhodes, Philip J. Ireland | 2004-08-17 |
| 6777308 | Method of improving HDP fill process | Li Li, Weimin Li | 2004-08-17 |
| 6773502 | Method of forming a crystalline phase material | Sujit Sharan | 2004-08-10 |
| 6774487 | Small grain size, conformal aluminum interconnects and method for their formation | Wing-Cheong Gilbert Lai | 2004-08-10 |
| 6770924 | Amorphous TiN films for an integrated capacitor dielectric/bottom plate using high dielectric constant materials | — | 2004-08-03 |
| 6767823 | Plasma enhanced chemical vapor deposition method of forming titanium silicide comprising layers | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Philip Campbell | 2004-07-27 |
| 6767806 | METHOD OF FORMING A PATTERNED SUBSTANTIALLY CRYSTALLINE TA2O5 COMPRISING MATERIAL, AND METHOD OF FORMING A CAPACITOR HAVING A CAPACITOR DIELECTRIC REGION COMPRISING SUBSTANTIALLY CRYSTALLINE TA2O5 COMPRISING MATERIAL | Cem Basceri, Garo Derderian, Mark Visokay, John M. Drynan | 2004-07-27 |
| 6765250 | Self-aligned, trenchless mangetoresitive random-access memory (MRAM) structure with sidewall containment of MRAM structure | Trung T. Doan, Roger Lee, Dennis Keller, Ren Earl | 2004-07-20 |
| 6764956 | Methods of treating dielectric materials | Trung T. Doan | 2004-07-20 |
| 6762924 | Capacitor compatible with high dielectric constant materials having two independent insulative layers and the method for forming same | Pierre C. Fazan | 2004-07-13 |
| 6762450 | Method of forming a capacitor and a capacitor construction | Pierre C. Fazan | 2004-07-13 |
| 6759306 | Methods of forming silicon dioxide layers and methods of forming trench isolation regions | Sujit Sharan | 2004-07-06 |
| 6759705 | Platinum-rhodium stack as an oxygen barrier in an integrated circuit capacitor | Haining Yang | 2004-07-06 |
| 6756293 | Combined gate cap or digit line and spacer deposition using HDP | Weimin Li, Sujit Sharan | 2004-06-29 |
| 6753271 | Atomic layer deposition methods | Demetrius Sarigiannis, Garo Derderian, Cem Basceri, F. Daniel Gealy, Chris M. Carlson | 2004-06-22 |
| 6753254 | Method for forming a metallization layer | Chris C. Yu | 2004-06-22 |
| 6752912 | Laser selection of ions for sputter deposition of titanium containing films | — | 2004-06-22 |
| 6749717 | Device for in-situ cleaning of an inductively-coupled plasma chambers | Sujit Sharan | 2004-06-15 |
| 6750089 | Methods of forming conductive interconnects | Trung T. Doan, Howard E. Rhodes, Sujit Sharan, Philip J. Ireland, Martin C. Roberts | 2004-06-15 |
| 6746934 | Atomic layer doping apparatus and method | Trung T. Doan | 2004-06-08 |
| 6743736 | Reactive gaseous deposition precursor feed apparatus | Allen Mardian | 2004-06-01 |
| 6739944 | System for real-time control of semiconductor wafer polishing | Trung T. Doan | 2004-05-25 |
| 6740554 | Methods to form rhodium-rich oxygen barriers | Haining Yang, Dan Gealy, Howard E. Rhodes, Mark Visokay | 2004-05-25 |
| 6737328 | Methods of forming silicon dioxide layers, and methods of forming trench isolation regions | Sujit Sharan | 2004-05-18 |
| 6734518 | Surface treatment of DARC films to reduce defects in subsequent cap layers | Zhiping Yin | 2004-05-11 |