Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821899 | System, method and apparatus for improved local dual-damascene planarization | Shrikant Lohokare, Andrew D. Bailey, III, Joel M. Cook | 2004-11-23 |
| 6808590 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, Nicolas Bright | 2004-10-26 |
| 6759336 | Methods for reducing contamination of semiconductor substrates | Robert Chebi | 2004-07-06 |
| 6736720 | Apparatus and methods for controlling wafer temperature in chemical mechanical polishing | Nicolas Bright | 2004-05-18 |
| 6716303 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Tuqiang Ni, Wenli Collison, Lumin Li | 2004-04-06 |