Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746961 | Plasma etching of dielectric layer with etch profile control | Lumin Li | 2004-06-08 |
| 6716303 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Wenli Collison, David Hemker, Lumin Li | 2004-04-06 |
| 6709547 | Moveable barrier for multiple etch processes | Kenji Takeshita, Brian McMillin | 2004-03-23 |
| 6692649 | Inductively coupled plasma downstream strip module | Wenli Collison, Michael Barnes, Butch Berney, Wayne Vereb, Brian McMillin | 2004-02-17 |