Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709547 | Moveable barrier for multiple etch processes | Tuqiang Ni, Brian McMillin | 2004-03-23 |
| 6710905 | Tandem scanning optical device | Hirofumi Nishikiuchi, Tsukasa Sugiura, Hajime Taniguchi, Hidenari Tachibe | 2004-03-23 |