Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709547 | Moveable barrier for multiple etch processes | Tuqiang Ni, Kenji Takeshita | 2004-03-23 |
| 6692649 | Inductively coupled plasma downstream strip module | Wenli Collison, Michael Barnes, Tuqiang Ni, Butch Berney, Wayne Vereb | 2004-02-17 |