Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716303 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Tuqiang Ni, David Hemker, Lumin Li | 2004-04-06 |
| 6692649 | Inductively coupled plasma downstream strip module | Michael Barnes, Tuqiang Ni, Butch Berney, Wayne Vereb, Brian McMillin | 2004-02-17 |