Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833325 | Method for plasma etching performance enhancement | Zhisong Huang | 2004-12-21 |
| 6746961 | Plasma etching of dielectric layer with etch profile control | Tuqiang Ni | 2004-06-08 |
| 6716303 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Tuqiang Ni, Wenli Collison, David Hemker | 2004-04-06 |