Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821899 | System, method and apparatus for improved local dual-damascene planarization | Shrikant Lohokare, David Hemker, Joel M. Cook | 2004-11-23 |
| 6744213 | Antenna for producing uniform process rates | Mark Wilcoxson | 2004-06-01 |
| 6723574 | Method for quantifying uniformity patterns and including expert knowledge for tool development and control | Puneet Yadav, Pratik Misra | 2004-04-20 |