Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808442 | Apparatus for removal/remaining thickness profile manipulation | David Wei, Yehiel Gotkis, John M. Boyd, Rod Kistler | 2004-10-26 |
| 6808590 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, David Hemker, Nicolas Bright | 2004-10-26 |
| 6769961 | Chemical mechanical planarization (CMP) apparatus | Rodney Kistler | 2004-08-03 |
| 6719874 | Active retaining ring support | Yehiel Gotkis, Miguel Saldana, David Wei, Damon Vincent Williams | 2004-04-13 |
| 6716299 | Profiled retaining ring for chemical mechanical planarization | Yehiel Gotkis, Jeffrey Yung | 2004-04-06 |