Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752703 | Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier film | John M. Boyd, Damon Vincent Williams | 2004-06-22 |
| 6725120 | Apparatus and methods with resolution enhancement feature for improving accuracy of conversion of required chemical mechanical polishing pressure to force to be applied by polishing head to wafer | — | 2004-04-20 |
| 6719874 | Active retaining ring support | Yehiel Gotkis, Aleksander Owczarz, David Wei, Damon Vincent Williams | 2004-04-13 |
| 6709322 | Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing | Damon Vincent Williams | 2004-03-23 |