Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752703 | Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier film | John M. Boyd, Miguel Saldana | 2004-06-22 |
| 6719874 | Active retaining ring support | Yehiel Gotkis, Aleksander Owczarz, Miguel Saldana, David Wei | 2004-04-13 |
| 6709322 | Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing | Miguel Saldana | 2004-03-23 |