Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808590 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Aleksander Owczarz, David Hemker, Nicolas Bright | 2004-10-26 |
| 6769961 | Chemical mechanical planarization (CMP) apparatus | Aleksander Owczarz | 2004-08-03 |
| 6752693 | Afferent-based polishing media for chemical mechanical planarization | — | 2004-06-22 |