Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808590 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2004-10-26 |
| 6736720 | Apparatus and methods for controlling wafer temperature in chemical mechanical polishing | David Hemker | 2004-05-18 |