Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828566 | Method and apparatus for specimen fabrication | Satoshi Tomimatsu, Yuichi Madokoro, Yoshimi Kawanami, Yasunori Doi | 2004-12-07 |
| 6797954 | Patterned wafer inspection method and apparatus therefor | Hiroyuki Shinada, Yusuke Yajima, Hisaya Murakoshi, Masaki Hasegawa, Mari Nozoe +4 more | 2004-09-28 |
| 6794663 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Eiichi Seya, Mitsuo Tokuda +3 more | 2004-09-21 |
| 6781125 | Method and apparatus for processing a micro sample | Mitsuo Tokuda, Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu +2 more | 2004-08-24 |
| 6750451 | Observation apparatus and observation method using an electron beam | Masanari Koguchi, Kuniyasu Nakamura, Yoshifumi Taniguchi, Mikio Ichihashi | 2004-06-15 |
| 6734687 | Apparatus for detecting defect in device and method of detecting defect | Tohru Ishitani, Hidemi Koike, Aritoshi Sugimoto, Isamu Sekihara, Satoshi Tomimatsu +1 more | 2004-05-11 |
| 6717156 | Beam as well as method and equipment for specimen fabrication | Masakazu Sugaya, Hiroyasu Shichi, Muneyuki Fukuda, Hidemi Koike | 2004-04-06 |