Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6717156 | Beam as well as method and equipment for specimen fabrication | Hiroyasu Shichi, Muneyuki Fukuda, Kaoru Umemura, Hidemi Koike | 2004-04-06 |
| 6687013 | Laser interferometer displacement measuring system, exposure apparatus, and electron beam lithography apparatus | Fumio Isshiki, Tatsundo Suzuki, Masahiro Yamaoka, Sumio Hosaka | 2004-02-03 |