Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806207 | Method of depositing low K films | Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more | 2004-10-19 |
| 6784119 | Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition | Frederic Gaillard, Li-Qun Xia, Tian-Hoe Lim, Ellie Yieh, Wai-Fan Yau +2 more | 2004-08-31 |
| 6770556 | Method of depositing a low dielectric with organo silane | Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu | 2004-08-03 |
| 6730593 | Method of depositing a low K dielectric with organo silane | Wai-Fan Yau, David Cheung, Shin-Puu Jeng, Yung-Cheng Yu | 2004-05-04 |