Issued Patents 2004
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6702648 | Use of scatterometry/reflectometry to measure thin film delamination during CMP | Steven C. Avanzino, Bhanwar Singh, Bharath Rangarajan | 2004-03-09 |
| 6689541 | Process for forming a photoresist mask | Scott A. Bell, Todd P. Lukanc, Christopher F. Lyons, Marina V. Plat | 2004-02-10 |
| 6685467 | System using hot and cold fluids to heat and cool plate | — | 2004-02-03 |
| 6686270 | Dual damascene trench depth monitoring | Christopher F. Lyons | 2004-02-03 |
| 6684172 | Sensor to predict void free films using various grating structures and characterize fill performance | Steven C. Avanzino, Christopher F. Lyons, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh +1 more | 2004-01-27 |