Issued Patents 2003
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670498 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima +1 more | 2003-12-30 |
| 6667145 | Resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tomohiro Kobayashi | 2003-12-23 |
| 6660448 | Polymer, resist composition and patterning process | Seiichiro Tachibana, Mutsuo Nakashima, Tsunehiro Nishi, Takeshi Kinsho, Koji Hasegawa +1 more | 2003-12-09 |
| 6660447 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Masaru Sasago, Masayuki Endo, Shinji Kishimura | 2003-12-09 |
| 6653044 | Chemical amplification type resist composition | Takanobu Takeda, Osamu Watanabe, Jun Watanabe, Tsunehiro Nishi, Takeshi Kinsho | 2003-11-25 |
| 6623909 | Polymers, resist compositions and patterning process | Toshiaki Takahashi, Toshinobu Ishihara, Jun Watanabe, Tohru Kubota, Yoshio Kawai | 2003-09-23 |
| 6603037 | Ester compounds | Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2003-08-05 |
| 6596463 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima +1 more | 2003-07-22 |
| 6586157 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Mutsuo Nakashima +1 more | 2003-07-01 |
| 6582880 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Yoshio Kawai, Masaru Sasago, Masayuki Endo +5 more | 2003-06-24 |
| 6579658 | Polymers, resist compositions and patterning process | Jun Watanabe, Yuji Harada | 2003-06-17 |
| 6566038 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Takeshi Kinsho, Koji Hasegawa +1 more | 2003-05-20 |
| 6566037 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho | 2003-05-20 |
| 6541179 | Resist compositions and patterning process | Youichi Ohsawa, Tsunehiro Nishi, Jun Watanabe | 2003-04-01 |
| 6531627 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima +1 more | 2003-03-11 |
| 6524765 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Seiichiro Tachibana | 2003-02-25 |
| 6515150 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa +1 more | 2003-02-04 |
| 6515149 | Acetal compound, polymer, resist composition and patterning response | Takeru Watanabe, Takeshi Kinsho, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima +1 more | 2003-02-04 |
| 6511787 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Yoshio Kawai, Masaru Sasago, Masayuki Endo +5 more | 2003-01-28 |
| 6509135 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho | 2003-01-21 |