Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653044 | Chemical amplification type resist composition | Osamu Watanabe, Jun Watanabe, Jun Hatakeyama, Tsunehiro Nishi, Takeshi Kinsho | 2003-11-25 |
| 6641975 | Resist composition and patterning process | Osamu Watanabe, Kazuhiro Hirahara, Kazunori Maeda, Wataru Kusaki, Shigehiro Nagura | 2003-11-04 |
| 6593056 | Chemically amplified positive resist composition and patterning method | Jun Watanabe, Katsuya Takemura, Kenji Koizumi | 2003-07-15 |