Issued Patents 2003
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670498 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-12-30 |
| 6667145 | Resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Koji Hasegawa, Tomohiro Kobayashi, Jun Hatakeyama | 2003-12-23 |
| 6660448 | Polymer, resist composition and patterning process | Seiichiro Tachibana, Mutsuo Nakashima, Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe +1 more | 2003-12-09 |
| 6653044 | Chemical amplification type resist composition | Takanobu Takeda, Osamu Watanabe, Jun Watanabe, Jun Hatakeyama, Tsunehiro Nishi | 2003-11-25 |
| 6605408 | Resist composition and patterning process | Tsunehiro Nishi, Shigehiro Nagura, Tomohiro Kobayashi, Satoshi Watanabe | 2003-08-12 |
| 6596463 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-07-22 |
| 6586157 | Ester compounds, polymers, resist compositions and patterning process | Koji Hasegawa, Tsunehiro Nishi, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-07-01 |
| 6566038 | Polymers, resist compositions and patterning process | Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana, Koji Hasegawa, Takeru Watanabe +1 more | 2003-05-20 |
| 6566037 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama | 2003-05-20 |
| 6531627 | Ester compounds, polymers, resist compositions and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-03-11 |
| 6524765 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Takeru Watanabe, Jun Hatakeyama, Koji Hasegawa, Seiichiro Tachibana | 2003-02-25 |
| 6515150 | Cyclic acetal compound, polymer, resist composition and patterning process | Mutsuo Nakashima, Seiichiro Tachibana, Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi +1 more | 2003-02-04 |
| 6515149 | Acetal compound, polymer, resist composition and patterning response | Takeru Watanabe, Koji Hasegawa, Tsunehiro Nishi, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2003-02-04 |
| 6509135 | Polymer, resist composition and patterning process | Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe, Jun Hatakeyama | 2003-01-21 |
| 6509481 | Tetrahydrofuran compounds having alicyclic structure | Koji Hasegawa, Takeru Watanabe | 2003-01-21 |