Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667415 | Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivatives and positive resist materials containing the same | Fujio Yagihashi, Jun Watanabe, Minoru Takamizawa, Akinobu Tanaka, Tadahito Matsuda | 2003-12-23 |
| 6623909 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Toshiaki Takahashi, Toshinobu Ishihara, Jun Watanabe, Tohru Kubota | 2003-09-23 |
| 6603037 | Ester compounds | Yuji Harada, Jun Hatakeyama, Masaru Sasago, Masayuki Endo, Shinji Kishimura +3 more | 2003-08-05 |
| 6582880 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Masaru Sasago, Masayuki Endo +5 more | 2003-06-24 |
| 6511787 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Masaru Sasago, Masayuki Endo +5 more | 2003-01-28 |