Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660447 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Jun Watanabe, Masaru Sasago, Masayuki Endo | 2003-12-09 |
| 6645694 | Pattern formation material and pattern formation method | Masayuki Endo, Masaru Sasago, Masamitsu Shirai, Masahiro Tsunooka | 2003-11-11 |
| 6632582 | Pattern formation material and pattern formation method | Masaru Sasago, Mitsuru Ueda | 2003-10-14 |
| 6603037 | Ester compounds | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2003-08-05 |
| 6582880 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago +5 more | 2003-06-24 |
| 6576398 | Pattern formation material and method | Masaru Sasago, Masamitsu Shirai, Masahiro Tsunooka | 2003-06-10 |
| 6537736 | Patten formation method | Akiko Katsuyama, Masaru Sasago | 2003-03-25 |
| 6531259 | Pattern formation method and pattern formation material | Akiko Katsuyama, Masaru Sasago | 2003-03-11 |
| 6528240 | Pattern formation method | Akiko Katsuyama, Masaru Sasago | 2003-03-04 |
| 6521393 | Pattern formation method | Akiko Katsuyama, Masaru Sasago | 2003-02-18 |
| 6511786 | Pattern formation material and pattern formation method | Masayuki Endo, Masaru Sasago, Masamitsu Shirai, Masahiro Tsunooka | 2003-01-28 |
| 6511787 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masaru Sasago +5 more | 2003-01-28 |