Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660447 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Jun Watanabe, Masayuki Endo, Shinji Kishimura | 2003-12-09 |
| 6645694 | Pattern formation material and pattern formation method | Shinji Kishimura, Masayuki Endo, Masamitsu Shirai, Masahiro Tsunooka | 2003-11-11 |
| 6632582 | Pattern formation material and pattern formation method | Shinji Kishimura, Mitsuru Ueda | 2003-10-14 |
| 6603037 | Ester compounds | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2003-08-05 |
| 6582880 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo +5 more | 2003-06-24 |
| 6576398 | Pattern formation material and method | Shinji Kishimura, Masamitsu Shirai, Masahiro Tsunooka | 2003-06-10 |
| 6537736 | Patten formation method | Shinji Kishimura, Akiko Katsuyama | 2003-03-25 |
| 6531259 | Pattern formation method and pattern formation material | Shinji Kishimura, Akiko Katsuyama | 2003-03-11 |
| 6528240 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2003-03-04 |
| 6521393 | Pattern formation method | Shinji Kishimura, Akiko Katsuyama | 2003-02-18 |
| 6511786 | Pattern formation material and pattern formation method | Shinji Kishimura, Masayuki Endo, Masamitsu Shirai, Masahiro Tsunooka | 2003-01-28 |
| 6511787 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masayuki Endo +5 more | 2003-01-28 |