Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660447 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Jun Watanabe, Masaru Sasago, Shinji Kishimura | 2003-12-09 |
| 6645694 | Pattern formation material and pattern formation method | Shinji Kishimura, Masaru Sasago, Masamitsu Shirai, Masahiro Tsunooka | 2003-11-11 |
| 6603037 | Ester compounds | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Shinji Kishimura +3 more | 2003-08-05 |
| 6582880 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago +5 more | 2003-06-24 |
| 6511786 | Pattern formation material and pattern formation method | Shinji Kishimura, Masaru Sasago, Masamitsu Shirai, Masahiro Tsunooka | 2003-01-28 |
| 6511787 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Jun Watanabe, Yoshio Kawai, Masaru Sasago +5 more | 2003-01-28 |