Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653027 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Cameron Brooks, S. Jay Chey, C. Richard Guarnieri, Michael S. Hibbs +1 more | 2003-11-25 |
| 6617086 | Forming a pattern of a negative photoresist | Marie Angelopoulos, Edward D. Babich, Inna V. Babich, James J. Bucchignano, Karen E. Petrillo +1 more | 2003-09-09 |
| 6514667 | Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof | Marie Angelopoulos, Alfred Grill, Scott D. Halle, Arpan Mahorowala, Vishnubhai V. Patel | 2003-02-04 |