Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653027 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Cameron Brooks, S. Jay Chey, Michael S. Hibbs +1 more | 2003-11-25 |
| 6503692 | Antireflective silicon-containing compositions as hardmask layer | Marie Angelopoulos, Ari Aviram, Wu-Song Huang, Ranee W. Kwong, Wayne M. Moreau | 2003-01-07 |