Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656666 | Topcoat process to prevent image collapse | John P. Simons, Kenneth McCullough, Charles J. Taft | 2003-12-02 |
| 6653233 | Process of providing a semiconductor device with electrical interconnection capability | John M. Cotte, Kenneth McCullough, Keith R. Pope, John P. Simons, Charles J. Taft +1 more | 2003-11-25 |
| 6653045 | Radiation sensitive silicon-containing negative resists and use thereof | Marie Angelopoulos, Ari Aviram, Wu-Song Huang, Ranee W. Kwong, Robert N. Lang +1 more | 2003-11-25 |
| 6622507 | Electromechanical device and a process of preparing same | John M. Cotte, Kenneth McCullough, John P. Simons, Charles J. Taft, Richard P. Volant | 2003-09-23 |
| 6586156 | Etch improved resist systems containing acrylate (or methacrylate) silane monomers | Marie Angelopoulos, Wu-Song Huang, Dai Junyan, Ranee W. Kwong, Robert N. Lang +3 more | 2003-07-01 |
| 6579464 | Fixtures for processing a workpiece in a supercritical fluid | John M. Cotte, Matteo Flotta, Kenneth McCullough, John P. Simons, Charles J. Taft | 2003-06-17 |
| 6561220 | Apparatus and method for increasing throughput in fluid processing | Kenneth McCullough, John P. Simons, Charles J. Taft, John M. Cotte | 2003-05-13 |
| 6558475 | Process for cleaning a workpiece using supercritical carbon dioxide | Jesse Jur, Kenneth McCullough, John P. Simons, Charles J. Taft | 2003-05-06 |
| 6543617 | Packaged radiation sensitive coated workpiece process for making and method of storing same | Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros, Karen E. Petrillo +2 more | 2003-04-08 |
| 6509136 | Process of drying a cast polymeric film disposed on a workpiece | Dario L. Goldfarb, Kenneth McCullough, David R. Medeiros, John P. Simons, Charles J. Taft | 2003-01-21 |
| 6503692 | Antireflective silicon-containing compositions as hardmask layer | Marie Angelopoulos, Ari Aviram, C. Richard Guarnieri, Wu-Song Huang, Ranee W. Kwong | 2003-01-07 |