Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641971 | Resist compositions comprising silyl ketals and methods of use thereof | Wu-Song Huang | 2003-11-04 |
| 6586156 | Etch improved resist systems containing acrylate (or methacrylate) silane monomers | Marie Angelopoulos, Wu-Song Huang, Dai Junyan, Ranee W. Kwong, Robert N. Lang +3 more | 2003-07-01 |
| 6543617 | Packaged radiation sensitive coated workpiece process for making and method of storing same | Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, Wayne M. Moreau, Karen E. Petrillo +2 more | 2003-04-08 |
| 6541398 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | Alfred Grill, Vishnubhai V. Patel | 2003-04-01 |
| 6509136 | Process of drying a cast polymeric film disposed on a workpiece | Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, John P. Simons, Charles J. Taft | 2003-01-21 |