Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541398 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | Alfred Grill, David R. Medeiros | 2003-04-01 |
| 6514667 | Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof | Marie Angelopoulos, Katherina Babich, Alfred Grill, Scott D. Halle, Arpan Mahorowala | 2003-02-04 |