Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593625 | Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing | Silke Christiansen, Jack O. Chu, Patricia M. Mooney | 2003-07-15 |
| 6555859 | Flip FERAM cell and method to form same | James W. Adkisson, Charles T. Black, Randy W. Mann, Deborah A. Neumayer, Wilbur D. Pricer +2 more | 2003-04-29 |
| 6541398 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | David R. Medeiros, Vishnubhai V. Patel | 2003-04-01 |
| 6514667 | Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof | Marie Angelopoulos, Katherina Babich, Scott D. Halle, Arpan Mahorowala, Vishnubhai V. Patel | 2003-02-04 |
| 6515335 | Method for fabrication of relaxed SiGe buffer layers on silicon-on-insulators and structures containing the same | Silke Christiansen, Patricia M. Mooney | 2003-02-04 |