Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593625 | Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing | Jack O. Chu, Alfred Grill, Patricia M. Mooney | 2003-07-15 |
| 6515335 | Method for fabrication of relaxed SiGe buffer layers on silicon-on-insulators and structures containing the same | Alfred Grill, Patricia M. Mooney | 2003-02-04 |