Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649531 | Process for forming a damascene structure | William J. Cote, Timothy J. Dalton, Prakash Dev, Daniel C. Edelstein, Scott D. Halle +1 more | 2003-11-18 |
| 6586156 | Etch improved resist systems containing acrylate (or methacrylate) silane monomers | Marie Angelopoulos, Wu-Song Huang, Dai Junyan, Ranee W. Kwong, Robert N. Lang +3 more | 2003-07-01 |
| 6514667 | Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof | Marie Angelopoulos, Katherina Babich, Alfred Grill, Scott D. Halle, Vishnubhai V. Patel | 2003-02-04 |