Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617086 | Forming a pattern of a negative photoresist | Marie Angelopoulos, Edward D. Babich, Inna V. Babich, Katherina Babich, James J. Bucchignano +1 more | 2003-09-09 |
| 6586156 | Etch improved resist systems containing acrylate (or methacrylate) silane monomers | Marie Angelopoulos, Wu-Song Huang, Dai Junyan, Ranee W. Kwong, Robert N. Lang +3 more | 2003-07-01 |
| 6543617 | Packaged radiation sensitive coated workpiece process for making and method of storing same | Marie Angelopoulos, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros, Wayne M. Moreau +2 more | 2003-04-08 |