Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653027 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, C. Richard Guarnieri, Michael S. Hibbs +1 more | 2003-11-25 |
| 6521383 | Pattern density tailoring for etching of advanced lithographic masks | Maheswaran Surendra, Douglas E. Benoit | 2003-02-18 |