Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6584368 | User configurable multivariate time series reduction tool control method | Raymond Bunkofske, John Z. Colt, Jr., James J. McGill, Nancy T. Pascoe, Marc A. Taubenblatt +1 more | 2003-06-24 |
| 6528363 | Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch | Victor Ku, Len Yuan Tsou, Ying Zhang | 2003-03-04 |
| 6521383 | Pattern density tailoring for etching of advanced lithographic masks | Douglas E. Benoit, Cameron Brooks | 2003-02-18 |
| 6518136 | Sacrificial polysilicon sidewall process and rapid thermal spike annealing for advance CMOS fabrication | Kam-Leung Lee, Ying Zhang, Edmund M. Sikorski | 2003-02-11 |