Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614079 | All-in-one disposable/permanent spacer elevated source/drain, self-aligned silicide CMOS | Ronnen Andrew Roy | 2003-09-02 |
| 6537886 | Ultra-shallow semiconductor junction formation | — | 2003-03-25 |
| 6518136 | Sacrificial polysilicon sidewall process and rapid thermal spike annealing for advance CMOS fabrication | Ying Zhang, Maheswaran Surendra, Edmund M. Sikorski | 2003-02-11 |