Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645861 | Self-aligned silicide process for silicon sidewall source and drain contacts | Cyril Cabral, Jr., Kevin K. Chan, Guy M. Cohen, Kathryn Guarini, Christian Lavoie +1 more | 2003-11-11 |
| 6527856 | Method for changing surface termination of a perovskite oxide substrate surface | David W. Abraham, Matthew W. Copel, James Misewich, Alejandro G. Schrott | 2003-03-04 |
| 6528363 | Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch | Victor Ku, Maheswaran Surendra, Len Yuan Tsou | 2003-03-04 |
| 6518136 | Sacrificial polysilicon sidewall process and rapid thermal spike annealing for advance CMOS fabrication | Kam-Leung Lee, Maheswaran Surendra, Edmund M. Sikorski | 2003-02-11 |