Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653027 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Cameron Brooks, S. Jay Chey, C. Richard Guarnieri +1 more | 2003-11-25 |
| 6627361 | Assist features for contact hole mask patterns | Orest Bula, Steven J. Holmes, Paul A. Rabidoux | 2003-09-30 |
| 6582857 | Repair of masks to promote adhesion of patches | Philip Flanigan, Dennis M. Hayden, Timothy E. Neary | 2003-06-24 |