Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6582857 | Repair of masks to promote adhesion of patches | Philip Flanigan, Michael S. Hibbs, Timothy E. Neary | 2003-06-24 |
| 6534225 | Tapered ion implantation with femtosecond laser ablation to remove printable alternating phase shift features | Steven Flanders, Timothy E. Neary | 2003-03-18 |
| 6515736 | Reticle capturing and handling system | Timothy E. Neary | 2003-02-04 |