Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638365 | Method for obtaining clean silicon surfaces for semiconductor manufacturing | Jianhui Ye, Alex See | 2003-10-28 |
| 6602801 | Method for forming a region of low dielectric constant nanoporous material | Siew Yong Kong, Alex See, Gautam Sarkar | 2003-08-05 |
| 6566260 | Non-metallic barrier formations for copper damascene type interconnects | Subhash Gupta, Mei Sheng Zhou, Sangki Hong | 2003-05-20 |
| 6565664 | Method for stripping copper in damascene interconnects | Subhash Gupta, Paul Ho, Mei Sheng Zhou | 2003-05-20 |
| 6540841 | Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate | Sudipto Ranendra Roy, Subhash Gupta, Xu Yi, Yakub Aliyu, Mei Sheng Zhou +2 more | 2003-04-01 |
| 6534388 | Method to reduce variation in LDD series resistance | Wenhe Lin, Zhong Dong, Kin Leong Pey | 2003-03-18 |
| 6531390 | Non-metallic barrier formations for copper damascene type interconnects | Subhash Gupta, Mei Sheng Zhou, Sangki Hong | 2003-03-11 |
| 6531386 | Method to fabricate dish-free copper interconnects | Victor Lim, Randall Cher Liang Cha | 2003-03-11 |
| 6530380 | Method for selective oxide etching in pre-metal deposition | Mei Sheng Zhou, Vincent Sih, Zainab Ismail, Ping Yu Ee, Sang Yee Loong | 2003-03-11 |
| 6524963 | Method to improve etching of organic-based, low dielectric constant materials | Mei Sheng Zhou, Jian Xun Li | 2003-02-25 |
| 6524910 | Method of forming dual thickness gate dielectric structures via use of silicon nitride layers | Wenhe Lin, Kin Leong Pey, Mei Sheng Zhou, Zhong Dong | 2003-02-25 |
| 6513374 | Apparatus to quantify the adhesion of film | Loh Nah Luona Goh, Siew Lok Toh, Tong Earn Tay | 2003-02-04 |