Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565664 | Method for stripping copper in damascene interconnects | Subhash Gupta, Simon Chooi, Mei Sheng Zhou | 2003-05-20 |
| 6548413 | Method to reduce microloading in metal etching | Thomas Schulue, Raymond Joy, Wai Lok Lee, Ramasamy Chockalingam, Ba Tuan Pham +1 more | 2003-04-15 |
| 6540841 | Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate | Sudipto Ranendra Roy, Subhash Gupta, Simon Chooi, Xu Yi, Yakub Aliyu +2 more | 2003-04-01 |