Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670209 | Embedded metal scheme for liquid crystal display (LCD) application | — | 2003-12-30 |
| 6572731 | Self-siphoning CMP tool design for applications such as copper CMP and low-k dielectric CMP | — | 2003-06-03 |
| 6547652 | Linear CMP tool design using in-situ slurry distribution and concurrent pad conditioning | — | 2003-04-15 |
| 6540841 | Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate | Subhash Gupta, Simon Chooi, Xu Yi, Yakub Aliyu, Mei Sheng Zhou +2 more | 2003-04-01 |
| 6521079 | Linear CMP tool design with closed loop slurry distribution | — | 2003-02-18 |