Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656643 | Method of extreme ultraviolet mask engineering | Mei Sheng Zhou | 2003-12-02 |
| 6565664 | Method for stripping copper in damascene interconnects | Simon Chooi, Paul Ho, Mei Sheng Zhou | 2003-05-20 |
| 6566260 | Non-metallic barrier formations for copper damascene type interconnects | Simon Chooi, Mei Sheng Zhou, Sangki Hong | 2003-05-20 |
| 6540841 | Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate | Sudipto Ranendra Roy, Simon Chooi, Xu Yi, Yakub Aliyu, Mei Sheng Zhou +2 more | 2003-04-01 |
| 6531390 | Non-metallic barrier formations for copper damascene type interconnects | Simon Chooi, Mei Sheng Zhou, Sangki Hong | 2003-03-11 |
| 6515342 | Method and system for providing inorganic vapor surface treatment for photoresist adhesion promotion | Bhanwar Singh, Carmen Morales | 2003-02-04 |