Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534393 | Method for fabricating local metal interconnections with low contact resistance and gate electrodes with improved electrical conductivity | Mei Sheng Zhou, Vijai Kumar Chhagan | 2003-03-18 |
| 6524963 | Method to improve etching of organic-based, low dielectric constant materials | Mei Sheng Zhou, Simon Chooi | 2003-02-25 |