Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660622 | Process for removing an underlying layer and depositing a barrier layer in one reactor | Seshadri Ganguli, Wei Cao, Christophe Marcadal | 2003-12-09 |
| 6643240 | Method of adjusting the drive speed of a CD drive | — | 2003-11-04 |
| 6620956 | Nitrogen analogs of copper II &bgr;-diketonates as source reagents for semiconductor processing | Barry Chin | 2003-09-16 |
| 6607976 | Copper interconnect barrier layer structure and formation method | Seshadri Ganguli, Christophe Marcadal, Wei Cao, Roderick C. Mosely, Mei Chang | 2003-08-19 |
| 6596643 | CVD TiSiN barrier for copper integration | Christophe Marcadal, Hyungsuk Alexander Yoon | 2003-07-22 |
| 6596085 | Methods and apparatus for improved vaporization of deposition material in a substrate processing system | John V. Schmitt, Shih-Hung Li, Christophe Marcadal, Anzhong Chang | 2003-07-22 |
| 6562715 | Barrier layer structure for copper metallization and method of forming the structure | Christophe Marcadal | 2003-05-13 |