Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620670 | Process conditions and precursors for atomic layer deposition (ALD) of AL2O3 | Kevin Song, Jallepally Ravi, Liang-Yuh Chen | 2003-09-16 |
| 6596085 | Methods and apparatus for improved vaporization of deposition material in a substrate processing system | John V. Schmitt, Christophe Marcadal, Anzhong Chang, Ling Chen | 2003-07-22 |